Not known Facts About Noohapou
Not known Facts About Noohapou
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Remote areas: Static units are generally situated remotely, increasing Price tag and decreasing overall method effectiveness.
thirty% of its peak energy consumption, supplying our customers sizeable reduction in running expenses and amplified trustworthiness.
While using the POU3500, you'll be able to attain unparalleled brings about etch performance, chamber uptime, reduced expense of ownership and fab Room utilization – all even though improving your system trustworthiness.
initially founded in 1985, our enterprise has developed into a identified chief in supplying temperature Management devices to the worldwide semiconductor field.
This impressive procedure, supplying a small form variable, affordable-of-possession and Dynamic Temperature Management offered system and tools engineers a brand new Resource to enhance their temperature delicate processes.
The precision of your POU 3300 allows for impartial control of the procedure check here fluid temperature to the wafer chuck inside of +/- 0.one °C of established issue, and the quickly response time on the procedure enables for optimum wafer-to-wafer repeatability through the etch process.
All static TCUs require excess cooling & heating capacities because of their incredibly significant method fluid reservoirs. the method fuid reservoir on LAUDA-Noah's dynamic temperature Regulate technique is fewer than 1 gallon.
With our unit strategically mounted close to six feet from your chamber, we realize a way more correct examining of your chuck temperature. This technique makes sure consistent temperature all over the creation lot, resulting in improved wafer-to-wafer CD uniformity.
Large Footprint: Static units occupy sizeable House throughout the fabrication tool spot, lowering its performance.
LAUDA-Noah is Conference these new problems and has included Electrical power preserving technologies in techniques which can be welcoming towards the natural environment and have a low price to operate.
the information set Here's from a 200mm quantity production wafer fab and Plainly illustrates the good thing about the LAUDA-Noah POU technique.
much more than at any time, shrinking system geometries, demanding new processes along with a very competitive natural environment need temperature Management programs that combine quickly and accurate temperature Management with the emphasis on minimized working fees and enhanced dependability.
verified; TEs' characterize just one A part of a chiller's style and design. The switching & Handle procedures employed by a chiller will impression the TEs' reliability.
(Therefore, setting up a static device next to chamber will never allow it to provide dynamic temperature Manage)
We are aware that good merchandise tend to be the results of great client feedback and the application of progressive know-how. We attempt to build price for our shoppers through a procedure that allows The shopper impact our plans, aims, item developments and organization practices.
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